Patent JPS63307271A successfully refreshed from Google Patents.
JPS63307271A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Sputtering device
Assignee: Hitachi Ltd
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Filing: 1987-06-10
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Granted: —
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Expires: 2007-06-10
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Hideaki Shimamura
- 👤 島村 英昭
- 👤 Masao Sakata
- 👤 坂田 正雄
- 👤 Yuji Yoneoka
- 👤 米岡 雄二
- 👤 Michiyoshi Kawahito
- 👤 川人 道善
- 👤 Hide Kobayashi
- 👤 秀 小林
- 👤 Tsuneaki Kamei
- 👤 亀井 常彰
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-10-31 14:24
CPC Classifications
—
Claims Analysis
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