Patent JPS6329931A successfully refreshed from Google Patents.
JPS6329931A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Manufacture of microstructure which is made of x-ray sensitive positive type resist and has different heights corresponding to the regions
Assignee: Karlsruher Institut für Technologie
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Filing: 1987-06-30
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Granted: —
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Expires: 2007-06-30
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 ヴオルフガング・エールフエルト
- 👤 フリードリツヒ・ゲツツ
- 👤 デイートリヒ・ミユンヒマイヤー
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-10 01:27
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/22
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