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Patent JPS6328883A successfully refreshed from Google Patents.
JPS6328883A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Plasma reactor
Assignee: Canon Inc
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Filing: 1986-07-23
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Granted: —
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Expires: 2006-07-23
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Toru Den
- 👤 透 田
- 👤 Kazuaki Omi
- 👤 近江 和明
- 👤 Masao Sugata
- 👤 菅田 正夫
- 👤 Noriko Kurihara
- 👤 栗原 紀子
- 👤 Hiroyuki Sugata
- 👤 裕之 菅田
- 👤 Kuniji Osabe
- 👤 長部 国志
- 👤 Nobuyuki Okamura
- 👤 信行 岡村
- 👤 Kenji Ando
- 👤 謙二 安藤
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-05 22:28
CPC Classifications
B; B01; B01J; B01J12/00; B01J12/002; B01J19/00; B01J19/08; B01J19/12; B01J19/122; B01J19/126; B01J2219/00; B01J2219/08; B01J2219/0894
Claims Analysis
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References Cited (Backward Citations)
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