reactor

Abstract

Abstract PURPOSE:To facilitate film-forming reaction, etc., by providing means of setting differential pressure between the upstream and downstream sides of a contracting-expanding nozzle attached to the inside of a reactor so as to prevent the flowing back of a film-forming gas, etc., and also to make an injection stream supersonic. CONSTITUTION:A film forming gas-feeding ring 4 is located on the downstream side of the contracting-expanding nozzle 1 attached to the 1-side of a reaction chamber 3, and an upstream chamber 8 is integral provided to the upstream side. A non-film- forming gas is supplied to the upstream chamber 8 and, while supplied with a film- forming gas from the film forming gas-feeding ring 4, the inside of the reaction chamber 3 is evacuated, so that pressure ratio between the upstream and downstream sides of the nozzle 1 is properly regulated. The above non-film-forming gas is spurted through the nozzle 1 into the reaction chamber 3 in a supersonic flow. When microwaves are sent from a microwave generator 13, microwave discharge takes place in the nozzle 1 and plasma is induced. Then, the active species, electrons, etc., produced by the above plasma are sent through the nozzle 1 in the form of a jet, which is brought into contact with the film-forming gas and activate it. The activated film-forming gas is allowed to adhere to the substrate 6, so that film formation can be carried out.

Inventors

• 👤 Toru Den
• 👤 透 田
• 👤 Kazuaki Omi
• 👤 近江　和明
• 👤 Masao Sugata
• 👤 菅田　正夫
• 👤 Noriko Kurihara
• 👤 栗原　紀子
• 👤 Hiroyuki Sugata
• 👤 裕之 菅田
• 👤 Kuniji Osabe
• 👤 長部　国志

Bibliographic Details