Vacuum treatment device

Abstract

Abstract PURPOSE:To eliminate atmospheric pollution and particle contamination and to improve the efficiency of an operation by communicating respective consecutive vacuum treatment chambers via sluice valves to a vacuum conveying chamber and moving substrates successively by using auxiliary conveying means. CONSTITUTION:The substrate A is introduced into the forward prevacuum chamber 8. The inside of the chamber 8 is evacuated and the sluice valve 5 on the lower side thereof is opened. The auxiliary conveying means 7 is moved upward to take the substrate A out thereof into the lower conveying chamber 2 thereof, then the sluice valve 5 is closed. The substrate A is transferred from a substrate receiver 7c on the conveying means 7 side to a substrate receiver 1c on the conveying means 1 side standing by in the upper space thereof. The substrate A is successively guided to right under the succeeding vacuum treatment chambers 4 by the actuation of the conveying means 1. The sluice valve 5 is then opened and the auxiliary conveying means 7 on the lower side thereof is moved upward to introduce the substrate A into the treatment chamber 4. The sluice valve 5 is then closed and the substrate is subjected to the prescribed vacuum treatment. The substrate A is thereafter introduced into the succeeding backward treatment chambers in the same manner and is subjected to respective vacuum treatments.

Inventors

• 👤 Toshiaki Fujioka
• 👤 藤岡　俊昭

Bibliographic Details