Oxide superconducting wiring structure

Abstract

Abstract PURPOSE:To realize a flattened, microstructure, low-resistance wiring for improving operating speeds and reliability by a method wherein portions other than conductors of metallic oxide superconductors are modified into resisting or insulating bodies. CONSTITUTION:A conductor 30 built of an oxide superconducting material (La1-XSrX)2CuO4-Y and an insulating layer 40, derived from the conductor 30 through modification by ion implantation, are provided on one and the same plane on a silicon substrate 10 covered by a silicon oxide film 20. Further, thereon, an oxide film 21 is formed for isolation between conducting layers, and then a junction hole 60 is provided for connecting lines. A conductor 31 is built again of the oxide superconducting material (La1-XSrX)2CuO4-Y, an insulating layer 41 is derived from the conductor 31 through modification by ion implantation, and then a resistance layer 50 is provided. A silicon oxide insulating layer 22 is formed as the topmost layer, wherein a junction hole 61 is provided.

Inventors

• 👤 Yutaka Misawa
• 👤 三沢　豊
• 👤 Takahiko Kato
• 👤 隆彦 加藤

Bibliographic Details