Force detector

Abstract

Abstract PURPOSE:To simplify the structure, and also, to execute the measurement with high accuracy by detecting the force working on a strain-generating body, as the resistance variation of a resistance element. CONSTITUTION:On a single crystal substrate 10 of silicon, resistance elements RX1-RX4, RY1-RY4 and RZ1-RZ4 having total 12 pieces of piezo-resistance effects are formed. The resistance elements RX1-RX4 are used for detecting the force in the X axis direction, the resistance elements RY1-RY4 are used for detecting the force in the Y axis direction, and the resistance elements RZ1-RZ4 are used for detecting the force in the Z axis direction. This single crystal substrate 10 is stuck to a strain-generating body 20, and the force working on this strain generating body 20 is detected as a resistance variation of the resistance elements RX1-RX4, RY1-RY4, and RZ1-RZ4.

Inventors

• 👤 Kazuhiro Okada
• 👤 和廣 岡田

Bibliographic Details