Minutely movable table apparatus

Abstract

Abstract PURPOSE:To obtain a thin apparatus characterized by high regidity, by providing a first table, which has a through hole at the center and is mounted on a base, and providing a second table, which is inserted in said through hole and mounted on the base like the first table. CONSTITUTION:Base 16 is provided. A first table 17 has a through hole at the center and is mounted on the base 16. The first table 17 is guided by a first guide means 18 so that the table 17 can be moved in the first moving direction. First driving means 19 and 20 move said first table 17 in the first moving direction. A second table 21 is inserted in the through hole of said first table 17 and is mounted on said base 16. A second guide means 22 guides the second table 21 so that the table 21 can be moved in the first moving direction together with the first table 17 as a unitary body and can be moved alone in the second moving direction. Second driving means 23 and 24 drive said second table 21 in said second moving direction. Thus a thin apparatus characterized by high rigidity and easy control of parallelism is obtained.

Inventors

• 👤 Hideo Nagai
• 👤 秀雄 永井

Bibliographic Details