Dust prevention plate for vacuum film forming equipment

Abstract

Abstract PURPOSE:To prevent exfoliation of film forming materials sticking to parts except a substrate to be treated and generation of dust by using the same material as the material of a target or vapor deposition source to form the parts except the substrate in a vacuum film forming device. CONSTITUTION:The high-purity Ta target 8 is disposed to face the substrate 6 in the vacuum vessel 1 provided with an evacuation system and a thin film of Ta is formed on the surface of the substrate 6 by sputtering. A shutter 3, a deposition preventive plate 2 on the inside surface of the vacuum vessel and a dust preventive plate 5 on the surface of a substrate holder 4, except the substrate 6 in the vacuum vessel are formed of Ta which is the same material as the material of the target in this case. The exfoliation of the thin Ta films sticking to these preventive plates by a difference in the coefft. of thermal expansion is obviated, since the preventive plates are made of Ta and, therefore, the exfoliation of Ta from the preventive plates and the generation of Ta dust are obviated.

Inventors

• 👤 Yoshiaki Mori
• 👤 義明 森

Bibliographic Details