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Patent JPS63197338A successfully refreshed from Google Patents.
JPS63197338A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Low temperature dry etching equipment
Assignee: Hitachi Ltd
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Filing: 1987-02-12
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Granted: —
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Expires: 2007-02-12
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Shinichi Taji
- 👤 新一 田地
- 👤 Kazunori Tsujimoto
- 👤 和典 辻本
- 👤 Sadayuki Okudaira
- 👤 奥平 定之
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 07:36
CPC Classifications
—
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