Piezoelectric selection valve and its driving method

Abstract

Abstract PURPOSE:To prevent creeping of flexible piezoelectric element, by applying voltage onto the flexible piezoelectric element only when a valve is opened and sealing through pressing force of fluid itself under closed state of valve. CONSTITUTION:One end sections of flexible piezoelectric elements 3a, 3b are secured by means of a securing member 2 in sub-chambers 11A, 11B. When different type of pressure fluids are fed in through fluid inlet ports 7a, 7b made through a sidewall 15 without application of voltage, valve bodies 4a, 4b of flexible piezoelectric elements 3a, 3b are pressed strongly against nozzles 6a, 6b at a communication port section by the pressure of fluid so as to seal the fluid. When voltage is applied onto the flexible piezoelectric element 3a and the valve body 4a is separated from the nozzle 6a, fluid in the sub-chamber 11A can be fed into a main chamber 10.

Inventors

• 👤 Takenobu Matsumura
• 👤 武宣 松村
• 👤 Keiichi Furuta
• 👤 圭一 古田

Bibliographic Details