Piezoelectric actuator

Abstract

Abstract PURPOSE:To position a piezoelectric actuator accurately at a high speed without necessity of controlling a closed loop by interposing a transmission member deformable by an external force between a piezoelectric element and a movable wall, and absorbing the displacement nonlinear characteristic of the element. CONSTITUTION:A piezoelectric actuator is composed by interposing a piezoelectric element 2 and a deformable transmission member 3 in series between the upper and lower walls of a holding member 1 which forms an elastic spring structure. The element 2 is displaced to be elongated by applying a voltage thereto, and a movable wall 13 is displaced under pressure through the member 3. At this time, the member 3 is elastically deformed by the pressure of the element 2 to absorb the displacement nonlinear characteristic of the element 2, thereby linearizing the displacing characteristic with respect to the wall 13.

Inventors

• 👤 Hiroshi Goto
• 👤 博史 後藤

Bibliographic Details