System for measuring dimension of pattern

Abstract

Abstract PURPOSE:To perform the statistical processing of data and the precise control of a fine pattern dimension, by applying file processing to the measured data measured by a pattern dimension measuring apparatus and making it possible to perform the preservation and communication of said data. CONSTITUTION:A pattern dimension measuring apparatus 20 is connected to a CPU 35 which is, in turn, connected to an external host computer CPU 40. The measured data measured by the apparatus 20 is subjected to file processing and the processed measured data are preserved and, further, data communication due to file transmission is performed between the apparatus 20 and a CPU 40. By this constitution, the measured data of a pattern dimension is subjected to file processing to be preserved as a data file and data communication can be performed between the apparatus 20 and the CPU 40 by file transmission. Therefore, large capacity measured data can be preserved in the CPU 40 for a long time to make it possible to easily perform the collation of the measured data and statistical processing is performed by the CPU 40 to make it possible to perform the quality control of the pattern dimension by each specimen and the precise control of the pattern dimension based on a statistical control technique.

Inventors

• 👤 Kazuhiro Tanaka
• 👤 和裕 田中

Bibliographic Details