Surface treatment device

Abstract

Abstract PURPOSE:To make it possible to perform surface treatment of high controllability and with no damage for an insulating film, by controlling incident energy to be 100 eV or less while preventing electrification on a surface of a sample. CONSTITUTION:Incident energy of charged particles coming to a surface of a sample disposed under a gaseous atmosphere is lowered to be 100 eV or less. Next, while a means preventive of electrification on the surface of the sample is formed, the incident energy is controlled. As a concrete means preventive of electrification, for example, positive and negative charges are made to become concurrently incident so as to be neutralized initially, or positive and negative charges are made to become alternately incident. Hence, surface treatment for the insulating film can be performed with high controllability and with no damage.

Inventors

• 👤 Takeshi Ninomiya
• 👤 健 二宮
• 👤 Keizo Suzuki
• 👤 敬三 鈴木
• 👤 Shigeru Nishimatsu
• 👤 西松　茂

Bibliographic Details