Measuring method for solid shape

Abstract

Abstract PURPOSE:To measure a shape with high accuracy by measuring intensity of light of reflected light from a bright line pattern with an optical detector and controlling the intensity of light uniformly so as to make the intensity of light of the reflected light constant based on the measured data. CONSTITUTION:The irradiated light 2 from an emission light source 1 is optically scanned vertically to the surface to be measured and moreover, in the vertical direction while synchronizing the intensity of light with the optical scanning of an optical deflector 4 and modulating the intensity of light by a light modulator 10 so that the intensity of light of the reflected light 9 is made constant based on sampling data. At this time, a bright line image (deformation slit image) 11 formed on the surface to be measured of a solid object 3 to be measured is picked up by two sets of image pickup cameras 12 and 12 arranged at both sides of the emission light source 1 and the position of the surface part to be measured on the bright line image 11 is measured to calculate its shape. The position of the bright line image 11 and the shape of the solid object 3 to be measured can be measured with high accuracy by repeating aforementioned measuring operation while moving the surface to be measured of the solid object 3 to be measured hereafter.

Inventors

• 👤 Satoshi Itami
• 👤 伊丹　敏
• 👤 Fumitaka Abe
• 👤 文隆 安部

Bibliographic Details