Patent JPS6286718A successfully refreshed from Google Patents.
JPS6286718A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Electron beam exposure device
Assignee: Mitsubishi Electric Corp
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Filing: 1985-10-11
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Granted: —
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Expires: 2005-10-11
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Kazunori Saito
- 👤 和則 斉藤
- 👤 Koichi Moriizumi
- 👤 森泉 幸一
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-07 07:22
CPC Classifications
—
Claims Analysis
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References Cited (Backward Citations)
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