grating cutlet pla

Abstract

Abstract PURPOSE:To obtain an almost plate-like single beam grating coupler by adding a reflective structure layer consisting of a buffer layer and a reflecting layer to an ordinary grating coupler. CONSTITUTION:The buffer layer 10 consisting of an inductive body is formed on the upper surface of a grating structure 3 and the film thickness is (d). The reflecting layer 11 consisting of metal is formed on the upper surface of the buffer layer 10 and the reflective structure layer is formed by the buffer layer 10 and the reflecting layer 11. When wave-guided light 4 transmitted through an optical waveguide layer 1 reaches the grating structure 3, the light is branched to radiation light to the buffer layer 10 side and radiation light to the base plate 2 side and radiated. The radiation light 12 to the buffer layer side is reflected by the upper metallic reflecting layer 11 and made incident on the optical waveguide layer 1, a part of the incident light is coupled with the wave-guided light in the waveguide layer 1 and the other is passed through the waveguide 1, and made incident on the base plate side, and the incident light 6' on the base plate side is superposed to the radiation light 6 to the base plate side.

Inventors

• 👤 Yuichi Handa
• 👤 半田　佑一

Bibliographic Details