Wafer conveyer

Abstract

Abstract PURPOSE:To obtain a stable position, when a wafer is attracted and dropped, and to improve accuracy of a conveyed position of the wafer, by lowering independent suspension type suckers, arranged in not less than a specific number of places on the peripheral part of a wafer surface, and attracting the total suckers to be mounted to the peripheral part of the wafer surface in a closely attached condition. CONSTITUTION:An arm 5, after it is moved so as to position four (three or more) suckers 2 in the upper of the peripheral part of a wafer 1, is lowered, and all of the four suckers 2 are closely attached to the peripheral part of a surface of the wafer 1. Here four of the suckers 2, being independently pressed to the wafer 1 by a spring 3, are attractively attached to the wafer 1 by supplying a vacuum from a vacuum supply port 4. Under this condition, the arm 5, being lifted and moved to the upper of an objective position, is lowered, and a conveyer, closely attaching the wafer 1 to the objective position and stopping supply of the vacuum from the vacuum supply port 4, finishes conveyance of the wafer by lifting the arm 5. In this way, the wafer can be attracted in a closely attached condition with no unreasonable force given to the wafer, and the wafer can be high accurately conveyed by decreasing the position displacement of the wafer.

Inventors

• 👤 Ichiro Hayashi
• 👤 一郎 林
• 👤 Toshinobu Banjo
• 👤 番條　敏信

Bibliographic Details