Patent JPS6283400A successfully refreshed from Google Patents.
JPS6283400A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Method of improving cylinder for vapor growth of organometallic compound
Assignee: TOYO SUTOUFUAA CHEM KK
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Filing: 1985-10-02
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Granted: —
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Expires: 2005-10-02
Abstract
Abstract PURPOSE:To obtain a thin crystal film having uniform composition by providing a porous diffuser at the lower part of the dip tube of a dopant of the cylinder for the vapor growth of an organometallic compd. and uniformize the amt. of the dopant to be injected. CONSTITUTION:A porous diffuser such as a plastic ball filter and a cell ball disk having pores of 1-100mu size is provided at the lower part of the dip tube of a dopant of the cylinder for the vapor growth of an organometallic compd.
Inventors
- 👤 Masao Fujisawa
- 👤 藤沢 正男
- 👤 Shinichi Hashimoto
- 👤 真一 橋本
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 06:31
CPC Classifications
—
Claims Analysis
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References Cited (Backward Citations)
JPS60131973A
Cited
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