JPS6283400A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Method of improving cylinder for vapor growth of organometallic compound
Assignee: TOYO SUTOUFUAA CHEM KK
•
Filing: 1985-10-02
•
Granted: —
•
Expires: 2005-10-02
Abstract
Abstract PURPOSE:To obtain a thin crystal film having uniform composition by providing a porous diffuser at the lower part of the dip tube of a dopant of the cylinder for the vapor growth of an organometallic compd. and uniformize the amt. of the dopant to be injected. CONSTITUTION:A porous diffuser such as a plastic ball filter and a cell ball disk having pores of 1-100mu size is provided at the lower part of the dip tube of a dopant of the cylinder for the vapor growth of an organometallic compd.
Inventors
- 👤 Masao Fujisawa
- 👤 藤沢 正男
- 👤 Shinichi Hashimoto
- 👤 真一 橋本
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 02:05
CPC Classifications
—
Claims Analysis
Total Claims: 0
No claims parsed yet. Click Sync Now above to re-index claims from Google Patents.
References Cited (Backward Citations)
JPS60131973A
Cited
USPTO Annuity & Maintenance Windows
Maintenance schedule is calculated for granted US utility patents.