Optical waveguide device

Abstract

Abstract PURPOSE:To suppress variation of characteristics due to a rise in temperature by composing an optical waveguide device of a waveguide formed of a ferroelectric body with pyroelectric effect, plural electrodes which are provided nearby the waveguide and vary the refractive index of the waveguide by controlling an electric field, and a film body made of a material which is provided between electrodes to induce charges. CONSTITUTION:The waveguide is formed of a Ti diffused layer 2 on an NiLbO3 substrate 1 and an SiO2 film is formed as a buffer layer 3 on tits top surface; and at least two electrodes 4 are made of aluminum and the top surfaces of the buffer layer 3 and electrodes 4 are coated with a transparent film body 6 of ITO by sputtering. Consequently, even if the temperature rises, negative charges are induced in the electrodes 4 and ITO film body 6 by pyroelectric effect corresponding to positive charges generated by the polarization of the substrate 1. The distribution of charges is therefore uniform, so no electric field is generated from between electrodes to the electrodes. Consequently, the electric field from the electrodes 4 to the waveguide does not change even in case of a temperature rise and characteristics of the optical waveguide device are prevented from varying owing to the temperature rise.

Inventors

• 👤 Ippei Sawaki
• 👤 一平 佐脇
• 👤 Minoru Kiyono
• 👤 實 清野
• 👤 Hiroki Nakajima
• 👤 啓幾 中島

Bibliographic Details