Film formation device

Abstract

Abstract PURPOSE:To efficiently perform the film formation on a supporter in excellent uniformity by arranging plural rodlike supporters in a space constituted with a plane-shaped electrode which provided to a reaction vessel and generating the glow discharge between the supporters and the electrode. CONSTITUTION:A plane-shaped electrode 3 is provided to the inside of a vacuum chamber 4 as an airtight reaction vessel and plural rodlike supporters 2 are arranged in the specified direction in the inside of the constituted space. Plural rodlike supporters 2 are not same electric potential as the electrode 3 and rotated via a gear 9 with a motor. The electrode 3 is not electrically grounded and electrically floated via the insulators 5. The supporters 2 are heated with a heat and gaseous raw material is introduced into the inside of the chamber 4 through an introduction port 10 and discharged through an exhaust port 11. Voltage is impressed between the supporters 2 and the electrode 3 via a matching box 7 from an electric power source 6 to generate the glow discharge. Thereby the film formation is efficiently performed in excellent uniformity on the supporters 2 by decomposing the gaseous raw material.

Inventors

• 👤 Mutsuki Yamazaki
• 👤 六月 山崎

Bibliographic Details