Shifter for thin plate material

Abstract

Abstract PURPOSE:To ensure receipts and delivery of wafers to aim at preventing the wafers from being broken, by providing a cassette positioning means which is adapted to be associated with the elevation of an elevating rod having its upper end provided with a wafer support member. CONSTITUTION:Cassette 21 are set on both loading frames 4, and when an elevating frame 5 is raised, both support members 10 enter into the cassettes 21 which are simultaneously positioned by means of a positioning means 20. Furthers, wafers 23 in the left cassette 21 is positioned in a receiving groove 11 formed in the left support member 10 at a predetermined position. Then the wafers 23 are fitted into the receiving groove 11, and then pushed up to come out from the cassette 21. Therefore, the wafers are shifted into a holding member 27. When the support members 10 descend, the holding member 27 is moved to a position right above the right cassette 21, and the elevating frame 5 ascends to shift the wafers 23 into the holding member 10. Then the wafers are rotated and is vertically directed. When the elevating frame 5 is lowered, the wafers 23 in the support members 10 are precisely stored in the positioned right cassette 21 without being made in contact with the cassette.

Inventors

• 👤 Shunsaku Kodama
• 👤 児玉　俊作

Bibliographic Details