Scanning type optical microscope

Abstract

Abstract PURPOSE:To obtain a dark field image at a low cost by forming a means for removing the zeroth-ordr diffracted light out of detected light in a detecting optical system for detecting light obtained from a substance. CONSTITUTION:A laser beam 34 is transmitted through a beam splitter 35, reflected by a galvanometer mirror 36 arranged on a conjugate position with an pupil of an objective lens in the Y direction and then reflected by a mirror 39 in the X direction to scan sample in the X-Y direction through an objective lens 42. The reflected light of the sample is returned and reflected to/by the splitter 35, the zeroth-order light out of the detected beam is cut off by inserting a doucer 53 forming a light shielding small black point on a glass plate on a converging position due to a condenser lens 51 to obtain a dark field image and then a differential image is obtained by arranging detectors 54, 55 symmetrically about the the optical axis. Thus, the dark field image can be obtained at a low cost.

Inventors

• 👤 Yoshiaki Horikawa
• 👤 嘉明 堀川

Bibliographic Details