Fluorescent x-ray analysis

Abstract

Abstract PURPOSE:To permit quick and exact quantitative analysis by setting an incident angle and exit angle at low angles and quantitatively determining the compsn. of a film by utilizing the characteristic to transmit and absorb X-rays then setting the incident angle and exit angle at this angles and quantitatively determining the deposition amt. of the film. CONSTITUTION:An X-ray source 2 which irradiates the excitation X-rays toward a Fe-Zn plated steel sheet 1 is provided above the sheet 1 in the position slightly off said sheet. The X-rays source 2 is moved on the arc around the sheet 1 so that the incident angle can be changed. A fluorescent X-rays are generated from the sheet 1 and the fluorescent X-rays detected by a detector 4 are converted to an electric signal when the excitation X-rays are irradiated to the sheet 1. The detector 4 moved on the 2nd arc around the sheet 1 and is so supported that the exit angle can be changed. The electric signal converted by the detector 4 is fed to an amplifier 5 and is then converted to the fluorescent X-ray intensity of a prescribed metallic element by a crest height analyzer 6 and a counter 7 and is conducted to an arithmetic control device 8, by which the thickness and compsn. of the alloy film are calculated and displayed 9 in accordance with the incident angle and exit angle.

Inventors

• 👤 Yoshiro Matsumoto
• 👤 松本　義朗
• 👤 Masakatsu Fujino
• 👤 藤野　允克

Bibliographic Details