Polygon mirror

Abstract

Abstract PURPOSE:To improve stability to vibration, etc., by forming convex surfaces as respective mirror surfaces of a polygon mirror formed by sticking plural mirror surfaces polygonally and setting the radius of curvature of each mirror surface larger than the radius of rotation of the side edge part of each mirror surface. CONSTITUTION:Each mirror surface 12 is formed convexly along the center axis of a mirror body 11 and the radius R of curvature is set larger than the radius (r) of rotation of the side edge part 12 of each mirror surface 12. A laser oscillator 14 for scanning the inspected surface 13a of an object body 13 by utilizing laser light is installed beside the polygon mirror 10. When the polygon mirror 10 is rotated and its respective mirror surfaces 12 are irradiated with the laser light from the laser oscillator 14, laser light reflected by the respective mirror surfaces 12 strike on the inspected surface 13a of the object body 13 while varying the angle. The necessary number of the mirror surfaces is reducible as compared with a conventional right polygonal mirror because the radius R of curvature of the mirror surfaces 12 is set larger than the radius (r) of rotation of the side edge parts 12a of the mirror surfaces 12.

Inventors

• 👤 Sumio Yamagami
• 👤 山上　純夫

Bibliographic Details