Capacity type thin film humidity sensor and its manufacture

Abstract

Abstract PURPOSE:To obtain a humidity sensor which has extremely superior humidity sensitivity and linearity by forming a thin film of an amorphous carbon compound. CONSTITUTION:The thin film 14 of the amorphous carbon compound is formed on a substrate 10 where lower electrodes 12 and 12 are formed to an about 1-2mum length independently of the substrate. Further, metal which is moisture- permeable and chemically stable, e.g., gold film or palladium film is vapor- deposited on the surface 16 of the thin film 14 to a 200-250Angstrom thickness, thus obtaining an upper electrode 18. Consequently, the humidity sensor is obtained which has extremely superior mechanical strength and extremely excellent response.

Inventors

• 👤 Yoichi Nabeta
• 👤 鍋田　庸一
• 👤 Kazuhiro Suzuki
• 👤 鈴木　一博
• 👤 Tadao Inuzuka
• 👤 犬塚　直夫

Bibliographic Details