Wafer cassette

Abstract

Abstract PURPOSE:To accomplish lot number identification and manufacturing process management by a method wherein an IC card is incorporated into a wafer cassette, the IC card is provided with WRITE and READ terminals, and data is written into or read from the IC card as necessary. CONSTITUTION:An IC card 2 is molded into a wafer cassette 1. The data in the IC card 2 is transmitted to the WRITE/READ unit of the IC card 2 through a READ terminal 3. The data in the WRITE/READ unit of the IC card 2 is recorded in the IC card 2 after through a WRITE terminal 4. A data display 5 indicates the manufacturing code and lot number involving the process to follow. Transportation to the place of the next processing is determined according to what is exhibited on the data display 5.

Inventors

• 👤 Shinji Shimokawa
• 👤 下川　伸治

Bibliographic Details