Production of semiconductor multibiosensor

Abstract

Abstract PURPOSE:To form enzyme immobilizing films which are different from each other on the same chip by removing part of the photoresist coated on a semiconductor wafer then coating a protein soln. thereon and dissolving the photoresist. CONSTITUTION:The photoresist film 6 soluble in acetone is spin-coated on the front of a wafer constituted by forming semiconductor field effect type ion sensors ISFETs by using an island-shaped silicon layer on the front of a sapphire substrate 1 and depositing gold 10 by evaporation on the rear. The photoresist film 6 on the surface to be provided with the enzyme immobilizing film 9 is thereafter removed by photolithography using a photomask. A protein soln. contg. the 1st enzyme and crosslinking agent is then spin-coated to form an urease immobilizing film 7. The water is then immersed in acetone to dissolve the photoresist 6 and at the same time to remove the urease immobilizing film coated thereon. A glucose immobilizing film 9 is also formed by repeating the similar stage.

Inventors

• 👤 Toshihide Kuriyama
• 👤 敏秀 栗山
• 👤 Jun Kimura
• 👤 純 木村
• 👤 Yoshie Kawana
• 👤 川名　美江

Bibliographic Details