Image pickup device

Abstract

Abstract PURPOSE:To obtain a small-sized and economical image pickup device high in resolution prevented from the generation of picture distortion due to the unevenness of scanning speeds by scanning an optical beam converged like a spot on a sample and receiving light flux refleced from the sample plural times by an image sensor. CONSTITUTION:An optical beam radiated from a light source 1 is polarized by an acoustic/optical element 3 in the main scanning direction at a prescribed scanning frequency and then polarized by an oscillation mirror 8 in the subscanning direction rectangular to the main scanning direction and the polarized optical beam is converged like a fine spot by an objective lens 9 and made incident upon the sample 10. The optical beam reflected by the sample 10 is made incident upon a linear image sensor 11 again through the lens 9. The sensor 11 is obtained by arranging plural elements one-dimensionally in the main scanning direction, receives the reflected light from the sample 10 and outputs an optoelectric output signal at a prescribed reading frequency. The scanning frequency of the main scanning direction on the sample is set up to almost integer times the reading frequency of the sensor 11 and the reflected light from the sample 10 is detected by the sensor 11 plural times.

Inventors

• 👤 Daikichi Awamura
• 👤 粟村　大吉

Bibliographic Details