Measuring device for concentration and partial pressure of gas

Abstract

Abstract PURPOSE:To remove a back light noise and to take accurate measurement by providing rotary sectors which rotate synchronously with each other on the optical axis of laser light emitted toward gas to be measured and a reflecting mirror between both sectors, and further providing a parabolic mirror for convergence and a spectroscope on the optical axis of reflected light. CONSTITUTION:The rotary sectors 4A and 4B which rotate in synchronization with each other are provided on the optical axis of light emitted by a light source 1 through an elliptic mirror 2 and a parabolic mirror 3; a transmission hole 14 and a total absorbing surface 15 are arranged on the sector 4A at the light source side and a total reflecting surface 16, a total absorbing surface 16, and a transmission hole 4 are arranged on the sector 4B at the side of the gas to be measured. A half-mirror 6 is arranged between the sectors 4A and 4B and a reflecting surface 7 is provided behind the gas 9 to be measured. Reflected light from the mirror 6 is incident on a spectroscope 10 through an off-axis parabolic mirror 8 and a photodetector 11 detects light emitted by the spectroscope 10. Measurement light and reference light pass through a window 13 provided to a main body 12. Thus, the concn. and partial pressure of many kinds of gas are measured simultaneously and accurately while a back light noise is removed.

Inventors

• 👤 Toru Inouchi
• 👤 徹 井内
• 👤 Taizo Hoshino
• 👤 泰三 星野

Bibliographic Details