Patent JPS6147628A successfully refreshed from Google Patents.
JPS6147628A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Formation of semiconductor thin film and apparatus therefor
Assignee: NTT Inc
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Filing: 1984-08-13
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Granted: —
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Expires: 2004-08-13
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Koichi Wakita
- 👤 紘一 脇田
- 👤 Tatsuo Aoki
- 👤 青木 達雄
- 👤 Seitaro Matsuo
- 👤 松尾 誠太郎
- 👤 Yasuhiro Torii
- 👤 鳥居 康弘
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 04:12
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/04; C23C16/042; C23C16/44; C23C16/50; C23C16/511
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
JPS56155535A
Cited
JPS57133636A
Cited
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