Evacuator

Abstract

Abstract PURPOSE:To remove the charging of the surface of a substrate to be treated, and to prevent the adhesion of dust by providing a means through which an ionized gas is introduced to the substrate to be treated when a vacuum chamber is returned to a low vacuum state containing normal pressure from a vacuum state. CONSTITUTION:A pre-chamber 2 is adjoined to a working chamber 1 under a vacuum state, and a gate valve 3 is fitted to a partition wall between both chambers. A stage 4 movable in the X and Y directions is positioned in the chamber 1, and an electrooptic lens tube 6 with an electron gun 7 and an irradiating window 5 are mounted to the upper wall of the chamber 1. A controller 8 controls the electron gun 7 and stage 4. The lower wall of the chamber 2 is connected to a vacuum pump 10 while interposing a vacuum valve 11. A holder is placed into the chamber 2, and a base 12 moved by a loader 13 is installed. A piping 14 connected to a nitrogen bomb 15 is mounted onto the upper wall of the chamber 2, and an ion generator 17 with a high-tension generator 20 is fitted to the piping.

Inventors

• 👤 Fumiaki Shigemitsu
• 👤 重光　文明
• 👤 Bunro Komatsu
• 👤 小松　文朗
• 👤 Shigeharu Horiuchi
• 👤 堀内　重治

Bibliographic Details