Color solid-state image pickup element

Abstract

Abstract PURPOSE:To improve the photosensitivity by concentrating incident light on the photo receiving part by a method wherein a recess of the uneven plane of the surface of a CCD solid-state image pickup element is provided with a filling layer curving downward and further with a smoothing layer of convex lens form. CONSTITUTION:A filing layer 5 made of transparent photosensitive resin is embedded in the recess of the photo receiving part 3. This filling layer 5 curves downward with the center as the lowest plane. In order to form this filling layer 5, a coat layer 11 of negagive or positive transparent photosensitive resin is formed in the uneven part of the titled elemet 1. Next, when the unhardened part or the softened part is removed with a developer after carrying out partial exposure to leave the coat layer 11 of photosensitive resin only in the recess, filling layers 5 curving downward so as to thinly cover the recess of the photo receiving part can be obtained. This filling layer 5 is applied only to the recess of the photo receiving part but is not present in the wiring layer 4 that is the projection; therefore, the level difference of this element 1 is recuded as a whole. After formation of filling layers 5, a transparent resin with a larger light refractive index than that of the filling layer 5 is formed by coating as the smoothing layer 9.

Inventors

• 👤 Katsumi Yamamoto
• 👤 克己 山本
• 👤 Kazuo Shimizu
• 👤 和夫 清水
• 👤 Hitoshi Fujino
• 👤 仁 藤野
• 👤 Tamahito Tani
• 👤 瑞仁 谷
• 👤 Itsuo Yaguchi
• 👤 矢口　逸夫

Bibliographic Details