JPS5373971A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Manufacture for semiconductor device
Assignee: Panasonic Holdings Corp
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Filing: 1976-12-14
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Granted: —
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Expires: 1996-12-14
Abstract
Abstract PURPOSE: To establish implanting layer on the substrate completely, by taking the photo sensitive resin as a mask after implating it only to the concave part of the film easily without mask matching and by selectively removing the film. COPYRIGHT: (C)1978,JPO&Japio
Inventors
- 👤 Yoshiyuki Takagi
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 03:43
CPC Classifications
—
Claims Analysis
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References Cited (Backward Citations)
JPS50107877A
Cited
JPS52119858A
Cited
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