Novel episulfide compound and preparation thereof

Abstract

Abstract PURPOSE:To obtain a novel linear copolymer, having a specific molecular weight, and useful as resist materials having high sensitivity and dry etching resistance, etc., by copolymerizing a specific episulfide group-containing styrene derivative with a comonomer in the presence of a polymerization initiator. CONSTITUTION:A monomer expressed by formula I (1 is H or 1-8C alkyl or halogen), e.g. 3-vinylstyrene episulfide, is copolymerized with a monomer expressed by formula II (W, X, Y and Z are H, halogen, cyano, 1-6C alkyl or 6-30C aryl, etc.), e.g. styrene, in the presence of a polymerization initiator to give the aimed novel linear copolymer, consisting of repeating structural units expressed by formulas III and IV, and having 500-5,000,000 number-average molecular weight.

Inventors

• 👤 Nobuo Nakasaki
• 👤 中崎　展男
• 👤 Hideo Ai
• 👤 愛　英夫

Bibliographic Details