Raw material feeder for single crystal pulling machine

Abstract

Abstract PURPOSE:To eliminate admixture of impurities and to produce single crystal relatively inexpensively, by applying a polycrystalline silicon or amorphous silicon layer to an inner face of a device with which a raw material is brought into contact. CONSTITUTION:The crucible 1 is set in a single crystal pulling machine, the raw material feeder 2 has the cylindrical main body 3, and the two covers 6 which are opened and closed round the shafts 4 as centers by the rods 5 at the bottom of the main body 3. The top of the main body 3 is supported by the suspending tool, etc., it is put in and taken out from the crucible 1 of the single crystal pulling machine. The inner faces of the main body 3 and the covers 6 are coated with the film 7 of coating of polycrystalline silicon or amorphous silicon formed by CVD method or PVD method. When the film 7 of coating is formed by CVD method, since the shape of the surface of substrate is kept, and the inner faces of the main body 3 and the covers 6 are abraded, the film 7 of coating with smooth surface can be formed. Friction between the film and the raw material 8 put in the interior can be lessened.

Inventors

• 👤 Taisan Goto
• 👤 後藤　泰山
• 👤 Kichizo Komiyama
• 👤 吉三 小宮山

Bibliographic Details