Detector for wrapage of substrate

Abstract

Abstract PURPOSE:To effect noncontact detection of wrapage of a substrate, by irradiat ing a measuring pint set on a printed board with a from of light collected to a point and measuring the reflected angle of the reflected beam by means of a sensor. CONSTITUTION:A printed board 1 is put on a surface plate as a substrate. A sensor 3 is arranged above the printed board 1. The sensor 3 is provided with a light emmitting means 4 and a reflected beam of the light irradiated on the printed board 1 is received by a light receiving means 5 and by the light receiving position, the angle of reflection of the reflected beam is detected. The sensor 3 is mounted on a driving means an X-Y table. The driving means 6 is controlled by an arithmetic processing unit 8 and moved to the specified position on the printed board 1. Output of the sensor 3 is amplified by an amplifier 7 and after arithmetic processing at the means 8 as preditermined and warpage of the surface of the printed board 1 is calculated. The amount of warpage is introduced into identifying means 9, memory 11, etc. for the necessary processing.

Inventors

• 👤 Yoshiaki Murakami
• 👤 善明 村上

Bibliographic Details