Driving controller for x-y-table

Abstract

Abstract PURPOSE:To improve the actual-use effect by automatically correcting the error due to the minute strain of a table by driving and controlling the table, automatically correcting the strain of the table, on the basis of the actually measured values of the quantity of strain of the table finely driven along the X-Y-axes. CONSTITUTION:Since the absolute coordinates (A, B) in the case when it is supposed that no strain exists on a table is (A+a, B-b), the given instruction (A,B) is corrected to (A-a, B+b) and given to an automatic control part 11. Then, an X-Y-table driving means 12 drives the table to the (A-a) point on the X-coordinate. Since the X-coordinate at the point (A, B) on the table strains by +a, the error due to the strain of the table can be corrected by the drive of the standard point to (A-a) position. Similarly, since the Y-coordinate strains by -b, this strain is corrected by the drive of the standard point to the (B+b) position. Thus, the error due to the fine strain of the table can be corrected automatically.

Inventors

• 👤 Yoshiji Namiki
• 👤 南木　美嗣

Bibliographic Details