Patent US5598470A successfully refreshed from Google Patents.
Patent JPS61107104A successfully refreshed from Google Patents.
JPS61107104A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Fine pattern depth measurement method and device
Assignee: Hitachi Ltd
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Filing: 1984-10-31
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Granted: —
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Expires: 2004-10-31
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Minoru Noguchi
- 👤 稔 野口
- 👤 Toru Otsubo
- 👤 徹 大坪
- 👤 Susumu Aiuchi
- 👤 進 相内
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-06 14:59
CPC Classifications
G; G01; G01B; G01B11/00; G01B11/22
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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