Manufacture of fine particles

Abstract

Abstract PURPOSE:To manufacture the fine particles having uniform forms by forming high-density minute projections having suitable height and diameter on the surface of a substrate, and shooting atoms, atom groups, molecules, and molecule groups on the substrate from a phase to grow as fine particles. CONSTITUTION:The high-density minute projections having suitable height and diameter are formed on the surface of a substrate, and atoms, atom groups, molecules, and molecule groups are shot to the substrate from a gas phase to grow as columnar or granular fine particles. In that case, minute projections, having 0.02-10mu length, 0.01-1mu diameter, and 5X10<5>-5X10<3> particle/mm.<2> density, are suitable for obtaining <=1mu fine particles. And the atoms, atom groups, molecules, and molecule groups to be shot on the substrate are required to contain essentially 3,000-0.1eV per atom. The temp. of the substrate is regulated suitably to <=500 deg.C, and the gaseous pressure in the gas phase to 1X10<-8>-10 Torr.

Inventors

• 👤 Yukio Nakanouchi
• 👤 中野内　幸雄
• 👤 Shigehiro Onuma
• 👤 繁弘 大沼
• 👤 Takeshi Masumoto
• 👤 健 増本

Bibliographic Details