Patent JPS6074531A successfully refreshed from Google Patents.
JPS6074531A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Vacuum processing device
Assignee: Hitachi Ltd
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Filing: 1983-09-30
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Granted: —
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Expires: 2003-09-30
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 Yutaka Kakehi
- 👤 掛樋 豊
- 👤 Norio Nakazato
- 👤 仲里 則男
- 👤 Yoshimasa Fukushima
- 👤 福島 喜正
- 👤 Fumio Shibata
- 👤 柴田 史雄
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-09 03:15
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/3435
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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