Clean booth

Abstract

Abstract PURPOSE:To prevent contamination by preventing the generation of bacteria in a waste liquid, by arranging a trap, wherein a sterilizing lamp is mounted to a waste liquid flowline for discharging the waste liquid, to constitute a clean booth, and sterilizing the waste liquid accumulated in the trap. CONSTITUTION:Purified air is supplied into a clean booth from an air filter 1 and exhausted from a duct 2. A waste liquid is discharged to a waste liquid flowline from a liquid discharge port 10 but a S-shaped trap 4 is provided on the way of the flowline and the waste liquid is temporarily accumulated in the trap 4. This trap 4 is formed of a quartz pipe and an ultraviolet sterilizing lamp 9 is provided to the outside of the trap 4. By providing the ultraviolet sterilizing lamp 9 to the trap 4, the waste liquid 8 accumulated in the trap 4 is sterilized to prevent the generation of bacteria. Therefore, bacteria is reversely diffused from the waste liquid 8 to prevent the contamination in the clean booth.

Inventors

• 👤 Ayako Shimazaki
• 👤 嶋崎　綾子
• 👤 Yuichi Mikata
• 👤 見方　裕一

Bibliographic Details