Laser oscillator

Abstract

Abstract PURPOSE:To enable to actuate a gaseous laser oscillator at high output power as well as to accurately control the oscillator by a method wherein the gaseous laser oscillator is driven by either of a DC discharge power source or a pulse discharge power source and a high-frequency discharge power source, or both of the aforementioned two power sources and the high-frequency discharge power source. CONSTITUTION:DC discharge is made to generate in DC discharge electrodes 6 and 7 by supplying DC voltage to the DC discharge electrodes 6 and 7 from a DC discharge power source device 10. In addition to this, high-frequency discharge is made to generate in laser tubes 1A by supplying high-frequency voltage to high-frequency discharge electrodes 8 and 9 from a high-frequency discharge power source device 11 and the laser oscillation is made to perform. In such a way, as one or two discharge power source devices are regarded as constant and the power source output of the remaining discharge power source can be diversely adjusted in a state that the prescribed discharge condition is being kept, the gaseous laser oscillator can be actuated at high output power, and at the same time, it becomes possible that the oscillator is accurately controlled.

Inventors

• 👤 Kiyoshi Inoue
• 👤 潔 井上

Bibliographic Details