Illuminating system of projecting and exposing device

Abstract

Abstract PURPOSE:To execute completely light shielding of an area except a pattern of a reticle by an illuminating system formed by placing a light shielding means on an optically conjugate surface to a circuit pattern surface of the reticle. CONSTITUTION:A light shielding device is placed to that its light shielding surface A becomes a relation to a pattern surface B of a reticle 22 by condenser lenses 19, 21, can be interlocked and turned with a rotation of the reticle 22 in order to align a rotating direction with a wafer which is placed and exposed under the reticle, by a driving mechanism, and also can be moved in the optical axis direction in order to maintain said conjugate relation, in case when the reticle 22 is replaced with a reticle which is different in thickness of its transparent part of glass, etc., and its refractive power is varied.

Inventors

• 👤 Toshio Matsuki
• 👤 松木　敏雄

Bibliographic Details