Torque sensor

Abstract

Abstract PURPOSE:To obtain the titled sensor without being influenced by a torque variation due to adhesion, to enable detecting accurately the torque, and to give easily an induction magnetism anisotropy thereto by sticking a magnetic metal tightly to a torque transferring shaft by using gas phase growth method. CONSTITUTION:An amorphous alloy thin film 12 is formed by using high frequency two-pole sputtering apparatus on an outer circumference of a ring 11 made of stainless steel having an inner diameter slightly larger than an outer diameter of the torque transferring shaft 13, fixed integrally to the shaft 13 and forming one part of said transferring shaft. Sputtering is performed by usual method, and an Fe75Si10B15 amorphous alloy thin film 12 is stuck by sputtering to the outer circumference under a state in which magnetic field is impressed in 45 degree direction against the circumferential direction of the ring 11 while water cooling the ring 11 to be a base body. At this time, the ring 11 being the base body is rotated to make the film thickness uniform. An internal stress in the film 12 is removed by heating the ring 11 stuck with the film 12 at the outer circumference in such a way, then the ring 12 is inserted into the shaft 13 to fix thereto and to unite these to one body.

Inventors

• 👤 Koichiro Inomata
• 👤 浩一郎 猪俣
• 👤 Masashi Sahashi
• 👤 政司 佐橋

Bibliographic Details