Fine movement device using laminated piezoelectric elements

Abstract

Abstract PURPOSE:To drive with a low voltage by employing a small-sized high performance laminated piezoelectric element for a clamping element. CONSTITUTION:Cylindrical piezoelectric elements 10, 11 having a shaft 9 and electrodes coated independently on the inner and outer peripheral surfaces and made of laminated piezoelectric elements engaged at an interval on the outer periphery of the shaft 9, holding members 12, 14 adhesively bonded to the outer peripheral surfaces of the elements 10, 11, and a hollow piezoelectric element 14 made of a laminated piezoelectric elements bonded at the end to the members 12, 13 are provided. Thus, when the clamping element having the same shape as the conventional clamping element is formed of the laminated piezoelectric elements, the performance of the same degree as the conventional clamping element can be obtained with the voltage of 1/10 of the conventional one.

Inventors

• 👤 Kunio Yamada
• 👤 邦雄 山田
• 👤 Sadayuki Takahashi
• 👤 高橋　貞行
• 👤 Keiji Nakamura
• 👤 中村　圭次
• 👤 Atsushi Hara
• 👤 敦史 原

Bibliographic Details