Patent JPS60201630A successfully refreshed from Google Patents.
JPS60201630A
Expired / Lapsed
JP
⏱️ 0.0 years remaining
Method of forming inspecting pattern
Assignee: International Business Machines Corp
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Filing: 1984-11-29
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Granted: —
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Expires: 2004-11-29
Abstract
Abstract Translated from Japanese (57)【要約】本公報は電子出願前の出願データであるた め要約のデータは記録されません。 (57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Inventors
- 👤 ウオーレス・ジヨセフ・ギローム
- 👤 ジヨン・フアーレイ・ローラン
- 👤 ジヤン・ロゴスキー
- 👤 ロバート・アーサー・シンプソン
- 👤 エドワード・ビクター・ウエバー
Bibliographic Details
Application Number
—
Jurisdiction
JP
Data Source
google_patents
Last Synchronized
2026-11-06 19:49
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/38; G03F1/44; G03F1/68; G03F1/82; G03F1/84; H; H01; H01J; H01J37/00; H01J37/30; H01J37/3002; H01J37/3005
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
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