Light irradiation treatment apparatus

Abstract

Abstract PURPOSE:To enable the shortening of a treating time, by forming a treatment chamber from a substrate and a movable member so as to make the movable member freely detachable to the substrate. CONSTITUTION:A treatment chamber 2 is held under a hermetically closed state and an exhaust apparatus 33 is operated to evacuate said treatment chamber 2. By this operation, a movable member 22 is attracted to a fixed case 23 to increase the close contact force of an O-ring 38 and the air-tightness of the treatment chamber 2 is made more certain. Next, O2 is sent into the treatment chamber 2 from an O2-gas bomb 31 and, when hydrogen gas discharge is subsequently generated in a gas discharge chamber 11, ultraviolet rays generated by this discharge are guided to the treatment chamber 2 through a pervious window 25 and ozone is generated in the treatment chamber 2 by said ultraviolet rays. By the oxidation reaction of this ozone, the org. substance adhered to the surface of a liquid crystal display panel is removed.

Inventors

• 👤 Masaaki Yada
• 👤 矢田　正明
• 👤 Shigeru Sudo
• 👤 須藤　繁

Bibliographic Details