Formation of multi-layered thin film and device used therein

Abstract

Abstract PURPOSE:To laminate and form easily plural thin films having a distinct boundary on substrates by disposing the substrates into a vacuum chamber and introducing successively required gases by using a gas introducing pipe body for forming the thin films having plural gas introducing parts and nozzles. CONSTITUTION:A device for forming thin films forms thin films on substrates 6 by segmenting the inside of a vacuum chamber 1 to the 1st and 2nd chambers 34, 34' by a partition wall, providing respectively gas lead-out ports 2, 2' thereto, imposing the substrates 6 on a substrate holding plate 7 rotated via a motor 9 and a gear 8 in the above-mentioned 1st chamber 34, heating the same by a heater 10 and supplying further gases through a gas introducing tubular body 5 for forming thin films. The gas introducing tubular body 5 of the above-mentioned device is constituted of plural coaxial gas introducing tubular bodies 35, 35' having respectively gas nozzle parts 3, 3'. Said tubular bodies are vertically moved by driving means 31, 32 to change over the gases introduced through gas introducing parts 4, 4' by each one kind and to supply the gases into the chamber 34. The multi-layered thin film laminated with the plural thin films having different compsns. is thus formed on each substrate 6.

Inventors

• 👤 Yoshihiro Imamura
• 👤 今村　義宏

Bibliographic Details